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Photoresist Processing  
No new posts Specific Resists or Polymers
Questions on special photoresists or photosensitive films in general
   
182 401 Tue 18 Nov, 2014 22:50
vckpnx View latest post
No new posts Storage and Handling of Photoresists
Storage conditions, handling and the effects of photoresist ageing
   
5 5 No Posts
No new posts Substrate Pretreatment
Cleaning and preparing the substrate for coating
   
11 115 Wed 22 Oct, 2014 13:51
CCde974bb View latest post
No new posts Adhesion Promotion
Improving the adhesion between substrate and resist or any other films coated onto the substrate
   
21 40 Wed 12 Nov, 2014 11:02
cxcdfgrerf View latest post
No new posts Resist Coating
Spin coating, spray coating, roller coating and dip coating
   
50 102 Sat 15 Nov, 2014 00:26
ifrtzriwlw View latest post
No new posts Softbake (Prebake)
The baking step between resist coating and exposure
   
2 8 Thu 01 Jan, 1970 01:00
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No new posts Rehydration
The delay between softbake and exposure
   
1 7 Thu 01 Jan, 1970 01:00
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No new posts Exposure
Exposure of the photoresist
   
19 55 Thu 01 Jan, 1970 01:00
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No new posts Post Exposure Bake
The baking step between exposure and development
   
7 10 Thu 01 Jan, 1970 01:00
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No new posts Development
Developing the exposed photoresist
   
11 21 Thu 01 Jan, 1970 01:00
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No new posts Hardbake
Baking the developed resist
   
5 20 Thu 01 Jan, 1970 01:00
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No new posts Unspecific
Questions not to be related with a certain process step
   
7 31 Thu 01 Jan, 1970 01:00
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Dry Etching  
No new posts Deformation or Bubbling of the Fotoresist Mask
The resist mask starts roundening or foaming during dry etching
   
0 0 No Posts
No new posts Resist Erosion
Etch rate ratio between the resist mask and the material to be etched
   
2 3 Thu 01 Jan, 1970 01:00
View latest post
No new posts Resist Removal After Etching
Processes and media to strip the resist mask after dry etching
   
31 49 Tue 18 Nov, 2014 10:15
gmzwdgyqda View latest post
No new posts Silicon Dry Etching
Dry etching of Silicon - recipes and parameters
   
7 7 Mon 03 Nov, 2014 11:05
monclerfemme View latest post
No new posts Dry etching of Other Materials
Dry etching of other materials - recipes, parameters and peculiarities
   
46 50 Thu 01 Jan, 1970 01:00
View latest post
Wet Etching  
No new posts General
General topics on wet chemical etching
   
73 75 Thu 01 Jan, 1970 01:00
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No new posts Aluminium
Wet chemical etching of Aluminium
   
4 4 Thu 01 Jan, 1970 01:00
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No new posts Chrome
Wet chemical etching of Chrome
   
5 5 Thu 01 Jan, 1970 01:00
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No new posts Copper
Wet chemical etching of Copper
   
5 7 Thu 01 Jan, 1970 01:00
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No new posts Glass / Quartz / SiO2
Wet chemical etching of glasses, quartz or SiO2
   
2 2 Thu 01 Jan, 1970 01:00
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No new posts Gold
Wet chemical etching of Gold
   
3 13 Thu 01 Jan, 1970 01:00
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No new posts Nickel
Wet chemical etching of Nickel
   
44 56 Thu 01 Jan, 1970 01:00
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No new posts Silicon
Wet chemical etching of Silicon
   
4 15 Mon 27 May, 2013 10:29
admin View latest post
No new posts SiNX
Wet chemical etching of SiNX
   
6 7 Thu 01 Jan, 1970 01:00
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No new posts Titanium
Wet chemical etching of Titanium
   
1 1 Thu 01 Jan, 1970 01:00
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No new posts Other Materials
Wet chemical etching of other materials not mentioned here
   
3 8 Thu 01 Jan, 1970 01:00
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Lift-Off  
No new posts Suited Photoresists
Photoresists suited for lift-off application
   
26 49 Thu 01 Jan, 1970 01:00
View latest post
No new posts Coating
Topics on coating of various materials on the resist mask
   
3 3 Thu 01 Jan, 1970 01:00
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No new posts Lift-Off
How to attain a good lift-off
   
17 131 Thu 01 Jan, 1970 01:00
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